Cleanroom Microfabrication / Cleanroom Microfabrication

Mads Clausen Institute, Sønderborg
Teaching activity id: MCCLM-U1.
Teaching language: English.ECTS / weighting: 5 ECTS / 0.083 full-time equivalent.
Period: Autumn 2015.Approved: 18-04-13.
Offered in: Sønderborg.
Subject director:
Programme coordinator Ib Christensen, MCI.

Prerequisites:
It is recommended that the modules MC-BMM, MC-DYM and/or ELEC are passed, but it is not a condition

Content - Key areas:
The objective of this course is to make the students familiar with the concepts, materials and methods typically used in a microfabrication process. The specific topics are:
Cleanroom technology
Silicon
  • Crystal structure
  • Wafer types and properties (sizes, crystal orientations, doping type and concentration)

Growth and deposition of thin films
  • Growth of silicon dioxide on silicon by thermal oxidation
  • Deposition of thin films by chemical vapor deposition
  • Deposition of thin films by physical vapor deposition
Photolithography for pattern definition
Etching
  • Wet etching
  • Dry etching.

Learning outcomes:
Knowledge
The knowledge of the basics of a cleanroom, the working procedures, and the safety aspects
The knowledge of the structure and properties of silicon and the reason for its large prevalence
The knowledge of photolithography and of the steps in the photolithographic process
The understanding of the process of formation of silicon dioxide by thermal oxidation
The knowledge of the most commonly used chemical and physical vapor deposition techniques incl. their operation principles and of which types of materials that can be deposited
The knowledge of the most commonly used wet and dry etching methods and their pros and cons
Skills
The ability to use a theoretical model to predict the resulting layer thickness of a silicon dioxide layer made by thermal oxidation
The ability to experimentally carry out a simple process recipe using the most common microfabrication techniques

Literature:
J. D. Plummer, M. D. Deal, and P. B. Griffin Silicon VLSI Technology, Prentice Hall, 2000, ISBN 0-13-085037-3


Time of classes:
Autumn

Form of instruction:
Lectures (34 h), Laboratory exercises (16 h).


Evaluation
Individual oral examination. Mark according to the 7-point scale. Co-examiner.


Comments:
Please note that this course is part of the 5th semester of the bachelor of engineering program in Mechatronics. The educational concept `The Engineering Education Model of the University of Southern Denmark¿, which underlies the curriculum for your study program, is structured around the objectives for the study program, the semester and the module. Accordingly, you should, as part of your studies, keep informed on objectives stated in the relevant study level of the curriculum for your study program.

Programmes:
Bachelor of Science in Engineering (Mechatronics)
5. semester, elective subject. Offered in: Sønderborg
Bachelor of Science in Engineering (Innovation and Business)
5. semester, elective subject. Offered in: Sønderborg
Bachelor of Engineering in Mechatronics
5. semester, elective subject. Offered in: Sønderborg
Bachelor of Engineering in Interaction Design
5. semester, elective subject. Offered in: Sønderborg